The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
ISBN: | 9783642268526 |
Publication date: | 3rd August 2013 |
Author: | Werner Karl Schomburg |
Publisher: | Springer an imprint of Springer Berlin Heidelberg |
Format: | Paperback |
Pagination: | 200 pages |
Series: | RWTH Edition |
Genres: |
Electronics engineering Electronics: circuits and components Engineering applications of electronic, magnetic, optical materials Applied physics |