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Introduction to Microsystem Design

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Introduction to Microsystem Design Synopsis

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.

About This Edition

ISBN: 9783642268526
Publication date:
Author: Werner Karl Schomburg
Publisher: Springer an imprint of Springer Berlin Heidelberg
Format: Paperback
Pagination: 200 pages
Series: RWTH Edition
Genres: Electronics engineering
Electronics: circuits and components
Engineering applications of electronic, magnetic, optical materials
Applied physics