This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.
| ISBN: | 9783030225971 |
| Publication date: | 30th July 2019 |
| Author: | Joshua Pelleg |
| Publisher: | Springer an imprint of Springer International Publishing |
| Format: | Hardback |
| Pagination: | 274 pages |
| Series: | Engineering Materials |
| Genres: |
Testing of materials Materials science |