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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors Synopsis

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.

About This Edition

ISBN: 9789811325700
Publication date: 23rd October 2018
Author: Toan Dinh, NamTrung Nguyen, Dzung Viet Dao
Publisher: Springer an imprint of Springer Nature Singapore
Format: Paperback
Pagination: 115 pages
Series: SpringerBriefs in Applied Sciences and Technology
Genres: Nanotechnology
Condensed matter physics (liquid state and solid state physics)
Electronics engineering