Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.
| ISBN: | 9780412395505 |
| Publication date: | 30th June 1993 |
| Author: | Kagaku Kogaku Kyokai |
| Publisher: | Springer an imprint of Springer Netherlands |
| Format: | Hardback |
| Pagination: | 210 pages |
| Genres: |
Industrial chemistry and chemical engineering Engineering applications of electronic, magnetic, optical materials Production and industrial engineering Mathematical theory of computation Biotechnology |