Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.
| ISBN: | 9780128178508 |
| Publication date: | 21st October 2020 |
| Author: | Wei Chair, Precision Nanometrology Laboratory Director, Research Center for Precision Nanosystems, Department of Fine Me Gao |
| Publisher: | Elsevier Science Publishing Co Inc |
| Format: | Paperback |
| Pagination: | 448 pages |
| Series: | Micro & Nano Technologies |
| Genres: |
Materials science |