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Micro/nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

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Micro/nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting Synopsis

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

About This Edition

ISBN: 9783662488140
Publication date:
Author: XiaoSheng Zhang
Publisher: Springer an imprint of Springer Berlin Heidelberg
Format: Hardback
Pagination: 122 pages
Series: Springer Theses
Genres: Electronics engineering
Nanotechnology
Energy, power generation, distribution and storage