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Handbook of Silicon Based MEMS Materials and Technologies

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Handbook of Silicon Based MEMS Materials and Technologies Synopsis

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students.

About This Edition

ISBN: 9780128177860
Publication date:
Author: Markku Director and Senior Vice President of Research, Okmetic, Finland retired Tilli
Publisher: Elsevier Science Publishing Co Inc
Format: Paperback
Pagination: 1026 pages
Series: Micro & Nano Technologies
Genres: Materials science